The files are in electronic format(PDF/DOC/DOCX) and will be sent to your email within hours.
JIS Standard Title:Semiconductor devices - Micro-electromechanical devices - Part 12: Bending fatigue testing method of thin film materials using resonant vibration of MEMS structures
JIS Standard NO.:JIS C 5630-12
Language:Japanese
This product was added to our catalog on Saturday 17 January, 2015.