JIS B 9960-33:2012Safety of machinery - Electrical equipment of machines Part 33: Requirements for semiconductor fabrication equipment
Abstract
This Japanese Industrial Standard applies to electrical equipment associated with semiconductor fabrication equipment for the manufacture, measurement, assembly, and test of semiconductors.
Details
Status |
Current |
Pages |
124 |
Language |
English |
Supersedes |
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Superseded By |
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DocumentFormat |
PDF(Copy/Paste/Networkable) |
Published |
21-05-2012 |
History |
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Note
We will send the latest version to you, please contact us if you want the exact document as the title. Some old Standards are in scancopy and no reaffirmed stamp
This product was added to our catalog on Saturday 10 March, 2018.